喷涂氧化铌靶材 Spray NbOx Target 产品说明Product description以等离子体为热源将Nb
2O
5粉末加热到熔融或半熔融状态并高速冲击背管表面形成致密涂层，从而制备出高纯度、高致密度NbO
x靶材。
With plasma as heat source, high purity high density NbOx target is produced from Nb2O5 powder, which is heated to molten or semi-molten state and deposited on the surface of backing tube at high speeds to form dense coatings.
| 项目 Item | 参数 Specifications | 检测手段 Testing method |
| 纯度 Purity | ≥99.9% | |
| 密度 Density | ≥4.7 g/cm3 | 阿基米德密度仪
Archimedes densimeter |
杂质含量
Impurities
| Ta: ≤200 ppm
Si: ≤80 ppm
Fe: ≤80 ppm
Al: ≤30 ppm
W: ≤30 ppm
Cu: ≤30 ppm
杂质总和 (Total impurity)：≤1000 ppm | 化学分析
Chemical ana lysis |
| 电阻率 Electrical resistivity | ≤0.2 Ωcm | 四探针电阻率仪
Four probe resistivity meter |
建议功率
Recommended power | 15 kw/m | |
背管材质 Backing tube
-选用304/316L不锈钢（无磁）。
304/316L stainless steel (non-magnetic).
靶材尺寸Dimension
-按照图纸要求加工
According to the customized drawings.
应用领域Applications
-主要用于LOW-E镀膜玻璃，薄膜太阳能电池电极膜系，TFT-LCD，半导体电子。
LOW-E glasses, electrodes of thin film solar cells, TFT-LCD, semiconductor devices.
